Method and apparatus for measuring electron density of...

Details Method and apparatus for measuring electron density of... Method and apparatus for measuring electron density of...

2004-04-26

2008-03-04

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

With plural diverse test or art

Reexamination Certificate

active

07339656

ABSTRACT:
An apparatus for measuring plasma electron density precisely measures electron density in plasma even under a low electron density condition or high pressure condition. This plasma electron density measuring apparatus includes a vector network analyzer in a measuring unit, which measures a complex reflection coefficient and determines a frequency characteristic of an imaginary part of the coefficient. A resonance frequency at a point where the imaginary part of the complex reflection coefficient is zero-crossed is read and the electron density is calculated based on the resonance frequency by a measurement control unit.

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