Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Aluminum spiking inspection method
Annealing of titanium - titanium nitride in contact hole
In-situ SOG etchback and deposition for IMD process
Nitridation of titanium, for use with tungsten filled contact ho
Pattern formation of silicon nitride
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