Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1995-04-28
2000-08-22
Niebling, John F.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438 14, 438 16, 438 17, 438754, 438756, H01L 2166, H01L 2144, H01L 21461
Patent
active
06107201&
ABSTRACT:
A method for inspection which involves the complete and sequential removal of an aluminum containing metallization layer, and other metal and insulator layers, from the surface of a silicon substrate. The layers are removed through sequential chemical etch processes tailored specifically to the composition of the individual layers. Upon removal of all layers, the surface of the silicon substrate is etched in a buffered aqueous etchant solution. The surface of the silicon substrate may then be inspected with the aid of an optical microscope to determine level to which the aluminum containing metallization layer has spiked into the silicon substrate.
REFERENCES:
patent: 4120744 (1978-10-01), Payne et al.
patent: 4429453 (1984-02-01), Hauck et al.
patent: 4542579 (1985-09-01), Poponiak et al.
patent: 4767497 (1988-08-01), Shattes et al.
patent: 4999160 (1991-03-01), Lowry et al.
patent: 5047367 (1991-09-01), Wei et al.
patent: 5143855 (1992-09-01), Pace et al.
S. Wolf, "Silicon Processing For The VLSI Era, vol. I", Lattice Press, 1986 pp. 531-533.
S. Wolf "Silicon Processing For The VLSI Era, vol. II", Lattice Press, 1990, pp. 101-102.
S. Wolf et al "Silicon Processing, for the VLSI Era, vol. I", Lattice Press, 1986, pp. 589-590.
VLSI Technology by S.M. Sze, Second Edition, Pub. by McGraw Hill in 1988, p. 226.
Ackerman Stephen B.
Nguyen Ha Tran
Niebling John F.
Saile George O.
Szecsy Alek P.
LandOfFree
Aluminum spiking inspection method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Aluminum spiking inspection method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aluminum spiking inspection method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-580751