4. Cleaning and liquid contact with solids
  5. Processes
  6. Using solid work treating agents

Chienfan Yu

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Device and method for accurate etching and removal of thin film

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Dual layer hard mask for eDRAM gate etch process

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate

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Dual mask process for semiconductor devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Endpoint detection by chemical reaction

Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate

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Endpoint detection by chemical reaction

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-607398

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