4. Semiconductor device manufacturing: process
  5. With measuring or testing

Cheng-Ming Lin

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AlSixOy as a new bi-layer high transmittance attenuating...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Application of high transmittance attenuating phase shifting...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and system for improving critical dimension proximity...

Semiconductor device manufacturing: process – With measuring or testing
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Method and system for reducing critical dimension...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Multiple exposure method for forming a patterned photoresist...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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