4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Post imaging radiant energy exposure

Chao-Chen Chen

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Baking of photoresist on wafers

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Post imaging radiant energy exposure
Patent

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Baking of photoresist on wafers

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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CU second electrode process with in situ ashing and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Integrated process for fuse opening and passivation process...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Metal filled semiconductor features with improved structural...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead
Reexamination Certificate

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