4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Cha-Won Koh

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Method and forming fine patterns of semiconductor devices...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of forming a mask structure and method of forming a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of forming pattern

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Method of forming pattern

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Methods of fabricating a semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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