4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Cebt Co. Ltd.

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Hole inspection apparatus and hole inspection method using...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Magnetic deflector for an electron column

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Method for focusing electron beam in electron column

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Portable electron microscope using micro-column

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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