Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-05-15
2011-12-06
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S492200, C250S492300
Reexamination Certificate
active
08071955
ABSTRACT:
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).
REFERENCES:
patent: 3406273 (1968-10-01), Holland
patent: 5847402 (1998-12-01), Nakasuji
patent: 6633366 (2003-10-01), De Jager et al.
patent: 7112803 (2006-09-01), Petrov et al.
patent: 7902521 (2011-03-01), Kim et al.
patent: 2002/0148971 (2002-10-01), Sogard
patent: 2003-187730 (2003-07-01), None
patent: WO 2006/004374 (2006-01-01), None
Kim Ho Seob
Kim Young Chul
Cebt Co. Ltd.
Park John K.
Park Law Firm
Wells Nikita
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