Magnetic deflector for an electron column

Details Magnetic deflector for an electron column Magnetic deflector for an electron column

2008-05-15

2011-12-06

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML, C250S492200, C250S492300

Reexamination Certificate

active

08071955

ABSTRACT:
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).

REFERENCES:
patent: 3406273 (1968-10-01), Holland
patent: 5847402 (1998-12-01), Nakasuji
patent: 6633366 (2003-10-01), De Jager et al.
patent: 7112803 (2006-09-01), Petrov et al.
patent: 7902521 (2011-03-01), Kim et al.
patent: 2002/0148971 (2002-10-01), Sogard
patent: 2003-187730 (2003-07-01), None
patent: WO 2006/004374 (2006-01-01), None

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