Portable electron microscope using micro-column

Details Portable electron microscope using micro-column Portable electron microscope using micro-column

2005-09-01

2011-12-06

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S310000, C250S492100, C250S492300

Reexamination Certificate

active

08071944

ABSTRACT:
Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a first chamber for receiving and fixing the microcolumn and a sample to be measured and forming a vacuum by means of the pumps, a controller, and a case for receiving the pumps, the chamber and the controller.

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