4. Computer-aided design and analysis of circuits and semiconductor
  5. Nanotechnology related integrated circuit design

Carlos A. Fonseca

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Alternating phase shift mask design with optimized phase shapes

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Alternating phase shift mask design with optimized phase shapes

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Dual tone development with plural photo-acid generators in...

Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Reexamination Certificate

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Method for evaluating the effects of multiple exposure...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Phase-width balanced alternating phase shift mask design

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2637679

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