Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Reexamination Certificate
2009-09-22
2010-11-09
Duda, Kathleen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Plural exposure steps
C430S311000, C430S328000
Reexamination Certificate
active
07829269
ABSTRACT:
A method and system for patterning a substrate using a dual tone development process is described. The method comprises use of plural photo-acid generators with or without a flood exposure of the substrate to improve process latitude for the dual tone development process.
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Machine English language translation of JP2000-199953, published Jul. 2000.
International Searching Authority, International Search Report and Written Opinion, International Application No. PCT/US10/31607, Mailed Jun. 10, 2010, 7 pages.
Fonseca Carlos A.
Printz Wallace P.
Scheer Steven
Somervell Mark
Duda Kathleen
Tokyo Electron Limited
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