6-mirror projection objective with few lenses

Details 6-mirror projection objective with few lenses 6-mirror projection objective with few lenses

2005-06-28

2005-06-28

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C359S365000, C359S366000

Reexamination Certificate

active

06912042

ABSTRACT:
There is provided a projection objective for wavelengths of ≦193 nm for imaging an object field in an object plane into an image field, in an image plane. The projection objective includes a first reflective optical element, a second reflective optical element, a third reflective optical element, a fourth reflective optical element, a fifth reflective optical element, and a sixth reflective optical element, and at least one refractive optical element. The refractive optical elements has a used area with a diameter. The projection objective has an image-side numerical aperture ≧0.65, and the used area of the refractive optical element has a diameter that is less than ⅓rdof the distance from the object plane to the image plane.

REFERENCES:
patent: 4701035 (1987-10-01), Hirose
patent: 5686728 (1997-11-01), Shafer
patent: 5815310 (1998-09-01), Williamson
patent: 2002/0056815 (2002-05-01), Mann et al.
patent: 2003/0197922 (2003-10-01), Hudyma
patent: 0 779 528 (1997-06-01), None
patent: 0 778 528 (2003-03-01), None
patent: 1 069 448 (2003-03-01), None
patent: WO 01/51979 (2001-07-01), None

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