4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Camelia Rusu

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High aspect ratio etch using modulation of RF powers of...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Mask profile control for controlling feature profile

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Mask profile control for controlling feature profile

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Methods of reducing photoresist distortion while etching in...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Multiple frequency plasma processor method and apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Profile ID: LFUS-PAI-P-2400499

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