4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

C. Robert Koemtzopoulos

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Chemical vapor deposition system with a plasma chamber having se

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Patent

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Chemical vapor deposition system with a plasma chamber...

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Reissue Patent

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Method for hard mask CD trim

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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