Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Patent
1996-07-09
1999-11-23
Smith, Lynette F.
Cleaning and liquid contact with solids
Processes
Hollow work, internal surface treatment
134 11, 134 37, 134 2218, 134 31, B08B 900, A45B 2512, A45B 2500, A45B 2514
Patent
active
059881879
ABSTRACT:
A method and arrangement for the insitu cleaning of a chamber in which process gas is injected into the chamber through gas injection ports. Separate gas injection ports through which process gas and the cleaning gas are injected into the chamber are provided. The process gas is injected into the chamber, such as a plasma chamber, through a first gas injection port while the cleaning gas, which cleans the residue left by the process gas during the deposition process, is injected into the chamber through the second gas injection port that is separate from the first gas injection port through which the process gas is injected. The separation of the gas injection ports provides an equalized pressure within the jet screw ports for the process gas and the interior of the chamber. This allows the jet screw ports to be maximally cleaned and reduces the frequency of replacement of the jet screw ports in the chamber.
REFERENCES:
patent: 4786352 (1988-11-01), Benzing
patent: 5207836 (1993-05-01), Chang
Koemtzopoulos C. Robert
Kozakevich Felix
Trussell David
Lam Research Corporation
Salimi Ali R.
Smith Lynette F.
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