4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Bu-Chin Chung

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Etch back method to planarize an interlayer having a critical HD

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method of fabricating flash memory cell

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Plasma etch equipment

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Plasma etch process

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Profile ID: LFUS-PAI-P-906239

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