4. Etching a substrate: processes
  5. Gas phase etching of substrate

Brent D. Schwab

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Method for etching high-k films in solutions comprising...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Use of silyating agents

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Use of silyating agents

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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UV/halogen treatment for dry oxide etching

Etching a substrate: processes – Gas phase etching of substrate
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