4. Semiconductor device manufacturing: process
  5. Having integral power source

Bradley K. Smith

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Atomic layer deposited dielectric layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Atomic layer deposition (ALD) method with enhanced...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Atomic layer deposition of titanium using batch type chamber...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Barrier material encapsulation of programmable material

Active solid-state devices (e.g. – transistors – solid-state diode – Bulk effect device – Bulk effect switching in amorphous material
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Biased H 2 etch process in deposition-etch-deposition gap fill

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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