4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Bok Hoen Kim

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Bi-layer approach for a hermetic low dielectric constant...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Blocker plate bypass to distribute gases in a chemical vapor...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Detecting chemiluminescent radiation in the cleaning of a...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Hermetic cap layers formed on low-κ films by plasma...

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Hermetic cap layers formed on low-k films by plasma enhanced...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2305915

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