4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Berthold Ocker

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Cathodic sputtering system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Coating apparatus

Coating apparatus – With means to apply electrical and/or radiant energy to work... – Electrostatic and/or electromagnetic attraction or...
Patent

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Large area sputter cathode having floating target segments

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputter cathode

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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