Coating apparatus

Details Coating apparatus Coating apparatus

1995-04-28

1996-06-25

Snay, Jeffrey R.

Coating apparatus

With means to apply electrical and/or radiant energy to work...

Electrostatic and/or electromagnetic attraction or...

20419212, 20429814, 20429802, C23C 1435

Patent

active

055296270

ABSTRACT:
The inside of a coating chamber (2) has a sputtering cathode (3) bearing a magnet set (6) and having a pot-shaped electrode (4) and a target (5). The electrode (4) is closed on the side facing away from the target (5) by a cover (11) to form a pressure equalizing chamber (12). The latter has a vacuum connection (13) for establishing a vacuum acting against the vacuum in the coating chamber (2).

REFERENCES:
patent: 4619755 (1986-10-01), Hessberger et al.
patent: 4824545 (1989-04-01), Arnold et al.
patent: 4946576 (1990-08-01), Dietrich et al.
patent: 5126033 (1992-06-01), Szczyrbowski et al.
patent: 5427665 (1995-06-01), Hartig et al.

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