4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Miscellaneous

Bang-Ching Ho

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Dual damascene process with dummy features

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method using specific contact angle for immersion lithography

Semiconductor device manufacturing: process – Miscellaneous
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Pattern compensation for stitching

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Photolithography method to prevent photoresist pattern collapse

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Scatterometric method of monitoring hot plate temperature...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Profile ID: LFUS-PAI-P-2281220

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