4. Photocopying
  5. Projection printing and copying cameras
  6. Methods

ASML Masktools B.V.

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Apparatus, method and computer program product for...

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
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Automatic optical proximity correction (OPC) rule generation

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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CPL mask and a method and program product for generating the...

Etching a substrate: processes – Forming or treating mask used for its nonetching function
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Feature optimization using enhanced interference mapping...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Hybrid phase-shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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