4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Asao Yamashita

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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate
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Formula-based run-to-run control

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Iso/nested cascading trim control with model feedback updates

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Method and apparatus for creating a gate optimization...

Data processing: measuring – calibrating – or testing – Calibration or correction system
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Method and system for performing a chemical oxide removal...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Profile ID: LFUS-PAI-P-2187464

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