4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Arthur M. Howald

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Antenna for plasma processor apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Apparatus and methods for improving the stability of RF...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Apparatus and methods for minimizing arcing in a plasma...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Dechucking method and apparatus for workpieces in vacuum...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Electrostatic dechucking method and apparatus for dielectric wor

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Profile ID: LFUS-PAI-P-1825682

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