4. Electricity: motive power systems
  5. Positional servo systems
  6. Program- or pattern-controlled systems

Applied Materials

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Articles for polishing semiconductor substrates

Abrading – Flexible-member tool – per se – Interrupted or composite work face
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Bi-layer approach for a hermetic low dielectric constant...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Carbonation of pH controlled KOH solution for improved...

Abrading – Abrading process – Glass or stone abrading
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Chemical dilution system for semiconductor device processing...

Agitating – Having specified feed means – Responsive to condition sensor
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Chemical mechanical polishing control system and method

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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