Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2006-05-09
2006-05-09
Rachuba, M. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S285000, C451S287000, C438S691000
Reexamination Certificate
active
07040966
ABSTRACT:
A method and polishing system for planarizing a substrate having one or more materials formed thereon. The method generally includes positioning the substrate in proximity with a polishing pad, dispensing a polishing fluid to the polishing pad, the polishing fluid being subjected to carbonation prior to being dispensed to the polishing pad, and polishing the substrate. The polishing system generally includes a polishing platen having a polishing pad disposed thereon and in proximity to the substrate, a controller configured to cause the polishing pad to contact the substrate, and a polishing fluid delivery system to deliver a polishing fluid to the polishing pad, the polishing fluid delivery system including a carbonation system.
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Danza Joseph M.
Delehanty Donald J.
Economikos Laertis
Heenan Daniel
Jamin Fen Fen
Applied Materials
International Business Machine Corporation
Patterson and Sheridan
Rachuba M.
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