Chemical dilution system for semiconductor device processing...

Details Chemical dilution system for semiconductor device processing... Chemical dilution system for semiconductor device processing...

2006-06-20

2006-06-20

Cooley, Charles E. (Department: 1723)

Agitating

Having specified feed means

Responsive to condition sensor

C366S162100

Reexamination Certificate

active

07063455

ABSTRACT:
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.

REFERENCES:
patent: 3807701 (1974-04-01), Reid et al.
patent: 3877682 (1975-04-01), Moss
patent: 5580168 (1996-12-01), Alireza et al.
patent: 5800056 (1998-09-01), Suzuki et al.
patent: 6572255 (2003-06-01), Husher
patent: 0136961 (1985-04-01), None
patent: 2081119 (1982-02-01), None

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