4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Electrolytic

Antoine P. Manens

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Algorithm for real-time process control of electro-polishing

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With control responsive to sensed condition
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Algorithm for real-time process control of electro-polishing

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With control responsive to sensed condition
Reexamination Certificate

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Apparatus for electrochemical processing

Abrading – Abrading process – Glass or stone abrading
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Biased retaining ring

Chemistry: electrical and wave energy – Apparatus – Electrolytic
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CMP pad thickness and profile monitoring system

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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