Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2004-12-02
2009-10-27
Wilkins, III, Harry D (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S297010, C204S297060
Reexamination Certificate
active
07608173
ABSTRACT:
A retaining ring for electrochemical mechanical processing is described. The ring has a conductive portion having an upper surface and a lower surface and an insulating portion. The insulating portion has one or more openings extending therethrough, exposing the lower surface of the conductive portion. An upper surface of the insulating portion contacts the lower surface of the conductive portion. In an electrochemical mechanical polishing process, the retaining ring can be biased separately from a substrate being polished.
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International Search Report and Written Opinion of the International Search Authority, International Application No. PCT/US2005/016431, Aug. 25, 2005, 10 pp.
Butterfield Paul D.
Duboust Alain
Liu Feng Q
Manens Antoine P.
Mavliev Rashid
Applied Materials Inc.
Fish & Richardson
Wilkins, III Harry D
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