Apparatus for electrochemical processing

Details Apparatus for electrochemical processing Apparatus for electrochemical processing

2005-04-26

2005-04-26

Thomas, David B. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S054000, C451S065000, C438S692000

Reexamination Certificate

active

06884153

ABSTRACT:
A method and apparatus for electrically biasing a substrate in an electrochemical processing system is generally provided. In one embodiment, an apparatus for electrochemical processing includes a polishing pad and a conductive element disposed therein. The polishing pad has an upper surface adapted to support a substrate thereon during processing. The conductive element disposed in the polishing pad is movable between a first position having at least a portion of the conductive element exposed above the upper surface and a second position below the upper surface, wherein the conductive element is magnetically biased towards the first position.

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