Algorithm for real-time process control of electro-polishing

Details Algorithm for real-time process control of electro-polishing Algorithm for real-time process control of electro-polishing

2006-09-26

2006-09-26

King, Roy (Department: 1742)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

With control responsive to sensed condition

Reexamination Certificate

active

07112270

ABSTRACT:
Method and apparatus for process control of electro-processes. The method includes electro-processing a wafer by the application of two or more biases and determining an amount of charge removed as a result of each bias, separately. In one embodiment, an endpoint is determined for each bias when the amount of charge removed for a bias substantially equals a respective target charge calculated for the bias.

REFERENCES:
patent: 3162588 (1964-12-01), Bell
patent: 3448023 (1969-06-01), Bell
patent: 3873512 (1975-03-01), Latanision
patent: 4119515 (1978-10-01), Costakis
patent: 4125444 (1978-11-01), Inoue
patent: 4713149 (1987-12-01), Hoshino
patent: 4793895 (1988-12-01), Kaanta et al.
patent: 4839993 (1989-06-01), Masuko et al.
patent: 4934102 (1990-06-01), Leach et al.
patent: 4954141 (1990-09-01), Takiyama et al.
patent: 4956056 (1990-09-01), Zubatova et al.
patent: 5096550 (1992-03-01), Mayer et al.
patent: 5136817 (1992-08-01), Tabata et al.
patent: 5217586 (1993-06-01), Datta et al.
patent: 5225034 (1993-07-01), Yu et al.
patent: 5534106 (1996-07-01), Cote et al.
patent: 5543032 (1996-08-01), Datta et al.
patent: 5567300 (1996-10-01), Datta et al.
patent: 5575706 (1996-11-01), Tsai et al.
patent: 5578362 (1996-11-01), Reinhardt et al.
patent: 5624300 (1997-04-01), Kishii et al.
patent: 5637031 (1997-06-01), Chen
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5766446 (1998-06-01), Spindt et al.
patent: 5804507 (1998-09-01), Perlov et al.
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5846882 (1998-12-01), Birang
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5911619 (1999-06-01), Uzoh et al.
patent: 5931719 (1999-08-01), Nagahara et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5966151 (1999-10-01), Wakahara
patent: 6001008 (1999-12-01), Fujimori et al.
patent: 6004880 (1999-12-01), Liu et al.
patent: 6010395 (2000-01-01), Nakajima
patent: 6017265 (2000-01-01), Cook et al.
patent: 6020264 (2000-02-01), Lustig et al.
patent: 6024630 (2000-02-01), Shendon et al.
patent: 6051116 (2000-04-01), Ichinose et al.
patent: 6056851 (2000-05-01), Hsieh et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6068818 (2000-05-01), Ackley et al.
patent: 6090239 (2000-07-01), Liu et al.
patent: 6103096 (2000-08-01), Datta et al.
patent: 6116998 (2000-09-01), Damgaard et al.
patent: 6141027 (2000-10-01), Akutsu et al.
patent: 6153043 (2000-11-01), Edelstein et al.
patent: 6156124 (2000-12-01), Tobin
patent: 6159079 (2000-12-01), Zuniga et al.
patent: 6171467 (2001-01-01), Weihs et al.
patent: 6176992 (2001-01-01), Talieh
patent: 6210257 (2001-04-01), Carlson
patent: 6234870 (2001-05-01), Uzoh et al.
patent: 6238271 (2001-05-01), Cesna
patent: 6244935 (2001-06-01), Birang et al.
patent: 6248222 (2001-06-01), Wang
patent: 6273798 (2001-08-01), Berman
patent: 6297159 (2001-10-01), Paton
patent: 6319420 (2001-11-01), Dow
patent: 6328872 (2001-12-01), Talieh et al.
patent: 6358118 (2002-03-01), Boehm et al.
patent: 6368184 (2002-04-01), Beckage
patent: 6368190 (2002-04-01), Easter et al.
patent: 6379223 (2002-04-01), Sun et al.
patent: 6381169 (2002-04-01), Bocian et al.
patent: 6386956 (2002-05-01), Sato et al.
patent: 6391166 (2002-05-01), Wang
patent: 6395152 (2002-05-01), Wang
patent: 6402591 (2002-06-01), Thornton
patent: 6406363 (2002-06-01), Xu et al.
patent: 6409904 (2002-06-01), Uzoh et al.
patent: 6413388 (2002-07-01), Uzoh et al.
patent: 6413403 (2002-07-01), Lindquist et al.
patent: 6440295 (2002-08-01), Wang
patent: 6447668 (2002-09-01), Want
patent: 6471847 (2002-10-01), Talieh et al.
patent: 6482307 (2002-11-01), Ashjaee et al.
patent: 6497800 (2002-12-01), Talieh et al.
patent: 6515493 (2003-02-01), Adams et al.
patent: 6582281 (2003-06-01), Doan et al.
patent: 6612904 (2003-09-01), Boehm et al.
patent: 6630059 (2003-10-01), Uzoh et al.
patent: 6638863 (2003-10-01), Wang et al.
patent: 6726823 (2004-04-01), Wang et al.
patent: 6776693 (2004-08-01), Duboust et al.
patent: 2001/0005667 (2001-06-01), Tolles et al.
patent: 2001/0024878 (2001-09-01), Nakamura
patent: 2001/0027018 (2001-10-01), Molnar
patent: 2001/0036746 (2001-11-01), Sato et al.
patent: 2001/0040100 (2001-11-01), Wang
patent: 2001/0042690 (2001-11-01), Talieh
patent: 2002/0008036 (2002-01-01), Wang
patent: 2002/0011417 (2002-01-01), Talieh et al.
patent: 2002/0020621 (2002-02-01), Uzoh et al.
patent: 2002/0025760 (2002-02-01), Lee et al.
patent: 2002/0025763 (2002-02-01), Lee et al.
patent: 2002/0052126 (2002-05-01), Lee et al.
patent: 2002/0070126 (2002-06-01), Sato et al.
patent: 2002/0077037 (2002-06-01), Tietz
patent: 2002/0088715 (2002-07-01), Talieh et al.
patent: 2002/0108861 (2002-08-01), Emesh et al.
patent: 2002/0119286 (2002-08-01), Chen et al.
patent: 2002/0130049 (2002-09-01), Chen et al.
patent: 2003/0104762 (2003-06-01), Sato et al.
patent: 2003/0109198 (2003-06-01), Lee et al.
patent: 2003/0114087 (2003-06-01), Duboust et al.
patent: 2003/0116446 (2003-06-01), Duboust et al.
patent: 2003/0213703 (2003-11-01), Wang et al.
patent: 2004/0023610 (2004-02-01), Hu et al.
patent: 3413762 (1983-05-01), None
patent: 0 325 753 (1989-08-01), None
patent: 0 455 455 (1991-06-01), None
patent: 1 103 346 (2001-05-01), None
patent: 1103346 (2001-05-01), None
patent: 1120694 (2001-08-01), None
patent: 2 214 520 (1989-09-01), None
patent: 11-42554 (1999-02-01), None
patent: 2001-77117 (2001-03-01), None
patent: 98/49723 (1998-11-01), None
patent: 99/41434 (1999-08-01), None
patent: 99/53119 (1999-10-01), None
patent: 00/03426 (2000-01-01), None
patent: 00/26443 (2000-05-01), None
patent: WO 04/024394 (2000-05-01), None
patent: 00/33356 (2000-06-01), None
patent: 02/064314 (2000-08-01), None
patent: 00/59682 (2000-10-01), None
patent: 01/49452 (2001-07-01), None
patent: 02/23616 (2002-03-01), None
patent: 03/001581 (2003-01-01), None
patent: WO 03/061905 (2003-07-01), None
D. Landolt, “Fundamental Aspects of Electropolishing”, Mar. 18, 1996, pp. 1-11.
Partial International Search Report for US 02/40754 dated Apr. 28, 2003 (AMAT/5998.PCT).
PCT International Preliminary Examination Report for PCT/US02/04806, dated Sep. 7, 2004. (AMAT/5699.PC).
PCT International Preliminary Examination Report for PCT/US03/06058, dated Sep. 7, 2004. (AMAT/5699.PC.02).
PCT International Search Report for US 02/04806 dated Apr. 1, 2003 (AMAT/5699.PC).
PCT International Search Report for US 03/06058 dated Jun. 25, 2003. (AMAT/5699.PC.02).
PCT Written Opinion for PCT/US02/04806, dated Mar. 9, 2004 (AMAT/5699.PC).
PCT Written Opinion for PCT/US03/06058, dated Feb. 13, 2004 (AMAT/5699.PC.02).
PCT International Search Report dated Mar. 30, 2005 for PCT/US2004/007501. (AMAT/7187.02.PC).
PCT Written Opinion dated Mar. 30, 2005 for PCT/US2004/007501. (AMAT/7187.02.PC).
PCT Written Opinion for PCT/US03/01760 dated Mar. 8, 2004 (AMAT/6339.PC).
PCT International Search Report for PCT/US03/01760 dated May 27, 2003 (AMAT/6339.PC).
PCT International Search Report for PCT/US03/29230 dated Feb. 3, 2004 (AMAT/6874.PC).
Contolini, et al. “Electrochemical Planarization of ULSI Copper,” Solid State Tech., vol. 40, No. 6, Jun. 1997.
U.S. Appl. No. 10/163,796 to Duboust, et al., filed Jun. 4, 2002.
U.S. Appl. No. 10/151,538, filed May 16, 2002, Wang et al.
U.S. Appl. No. 10/141,459, filed May 7, 2002, Sun et al.
U.S. Appl. No. 10/038,066, filed Jan. 3, 2002, Chen et al.
U.S. Appl. No. 10/033,732, to Chen, et al., filed Dec. 27, 2001.
U.S. Appl. No. 10/032,275, to Duboust, et al., filed Dec. 21, 2001.
PCT International Search Report, EPO International Searching Authority, Mail Date Jan. 16, 2006, pp. 1-4.
PCT Invitation to Pay Additional Fees for PCT/US04/006385 dated Mar. 22, 2005. (AMAT/7241PCT).
PCT International Search Report for PCT/US04/006385 dated May 17, 2005. (AMAT/7241PCT).
PCT Written Opinion for PCT/US04/006385 dated May 17, 2005. (AMAT/7241PCT).

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