4. Photocopying
  5. Projection printing and copying cameras
  6. Illumination systems or details

Anthony Yen

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Attenuated rim phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Defocus-invariant exposure for regular patterns

Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
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Dual damascene method employing sacrificial via fill layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Integrated circuit layout design

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Integrated circuit layout design

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1351777

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