Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2010-12-29
2011-10-18
Young, Christopher (Department: 1721)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S030000, C430S313000, C430S315000, C716S053000, C716S055000
Reexamination Certificate
active
08039179
ABSTRACT:
Provided is a photolithography apparatus including a photomask. The photomask includes a pattern having a plurality, of features, in an example, dummy line features. The pattern includes a first region being in the form of a localized on-grid array and a second region where at least one of the features has an increased width. The apparatus may include a second photomask which may define an active region. The feature with an increased width may be adjacent, and outside, the defined active region.
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Chang Chang-Yun
Shieh Ming-Feng
Wann Clement Hsingjen
Xu Jeff J.
Yen Anthony
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
Young Christopher
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