4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Anthony Francis Flannery, Jr.

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Method and system of releasing a MEMS structure

Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate

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Method of fabrication of a AL/GE bonding in a wafer...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Method of fabrication of AI/GE bonding in a wafer packaging...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Having enclosed cavity
Reexamination Certificate

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Method of making an X-Y axis dual-mass tuning fork gyroscope...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Method of making an X-Y axis dual-mass tuning fork gyroscope...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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