Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
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active
Method for etching a conducting layer of the step-covered struct
Planarized local oxidation by trench-around technology
Planarized local oxidation by trench-around technology
Technology for local oxidation of silicon
Trench isolation for both large and small areas by means of sili
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