Fishing – trapping – and vermin destroying
Patent
1994-05-24
1994-12-20
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 63, 437 64, 437 69, 437 72, 148DIG50, H01L 2176
Patent
active
053745833
ABSTRACT:
A new method of local oxidation by means of forming a plurality of silicon trenches is described. Portions of the insulating layer over the surface of a silicon substrate not covered by a mask pattern are etched through exposing the portion of the silicon substrate that will form the device isolation region. A first trench is etched into the exposed portion of the substrate. A layer of silicon nitride is deposited over the insulating layer and within the trench. A layer of an aluminum-silicon alloy is deposited overlying the silicon nitride layer. The aluminum-silicon layer is etched away whereby silicon nodules are formed on the surface of the silicon nitride layer. The nodules are oxidized to form silicon dioxide nodules. Using the silicon dioxide nodules as a mask, the silicon nitride layer is etched through to the insulating layer where it exists and to the silicon substrate surface where it is exposed and a set of narrow trenches is etched into the exposed portions of the substrate. The silicon substrate within the set of trenches is oxidized wherein the silicon is transformed to silicon dioxide and the silicon dioxide expands to fill the set of trenches. The silicon nitride layer and the silicon dioxide nodules within the opening are pushed up to align with the silicon nitride layer and the silicon dioxide nodules on either side of the opening. The remaining insulating layer and silicon nitride layer are removed wherein the silicon dioxide nodules are also removed completing the device isolation of the IC.
REFERENCES:
patent: 4211582 (1980-07-01), Horng et al.
patent: 5204280 (1993-04-01), Dhong et al.
patent: 5292689 (1994-03-01), Cronin et al.
patent: 5308786 (1994-05-01), Lur et al.
VLSI Technology, International Edition, by S. M. Sze, McGraw-Hill Book Co. New York, N.Y., .COPYRGT.1988 by McGraw-Hill Book Co. pp. 473-474.
Lur Water
Su Anna
Wu Jiun Y.
Dang Trung
Hearn Brian E.
Saile George O.
United Microelectronic Corporation
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