4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Amrita Verma

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Apparatus for improving film stability of halogen-doped...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method and apparatus for improving film stability of halogen-dop

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Patent

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Method and apparatus for improving the film quality of plasma en

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Patent

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Method and apparatus for improving the film quality of...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
Reexamination Certificate

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Method and apparatus for improving the film quality of...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1216071

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