4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Alon Litman

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Apparatus and method for enhanced voltage contrast analysis

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Electron detector with high backscattered electron acceptance fo

Radiant energy – With charged particle beam deflection or focussing – With detector
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Electrostatic chuck for wafer metrology and inspection...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck for wafer metrology and inspection...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Methods of scanning an object that includes multiple regions...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Profile ID: LFUS-PAI-P-827310

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