Methods of scanning an object that includes multiple regions...

Details Methods of scanning an object that includes multiple regions... Methods of scanning an object that includes multiple regions...

2007-10-23

2007-10-23

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S310000, C250S306000, C250S307000

Reexamination Certificate

active

11076483

ABSTRACT:
A multi beam inspection method and system. The inspection system includes: (i) a beam array generator adapted to generate an array of beams characterized by a beam array axis; and (ii) at least one mechanism adapted to position the object under the array of beams such that at least two beams that are positioned along a beam array axis scan substantially simultaneously at least two regions of interest of the object, wherein the first axis is oriented in relation to the beam array axis.

REFERENCES:
patent: 6038018 (2000-03-01), Yamazaki et al.
patent: 6465783 (2002-10-01), Nakasuji
patent: 6590218 (2003-07-01), Suzuki
patent: 6738506 (2004-05-01), Miller et al.
patent: 00377298 (1994-07-01), None
patent: 00289279 (1994-08-01), None
patent: 00518633 (1997-11-01), None

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