Electron detector with high backscattered electron acceptance fo

Details Electron detector with high backscattered electron acceptance fo Electron detector with high backscattered electron acceptance fo

1994-06-20

1995-11-14

Berman, Jack L.

Radiant energy

With charged particle beam deflection or focussing

With detector

250305, H01J 37244

Patent

active

054669405

ABSTRACT:
An electron detector for use in particle beam apparatus, providing particularly high acceptance of backscattered electrons. The electron detector includes an electron multiplier for detecting electrons and an electrode deployed between the electron multiplier and a specimen. The electrode is biased at a negative potential with respect to the specimen and also with respect to the electron multiplier.

REFERENCES:
patent: 3896308 (1975-07-01), Venables et al.
patent: 4958079 (1990-09-01), Gray

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