4. Abrading
  5. Precision device or process - or with condition responsive...
  6. With indicating

Allen Yen

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Apparatus for chemical mechanical polishing endpoint...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Damascene structure having a metal-oxide-metal capacitor...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Deep sub-micron metal etch with in-situ hard mask etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Define via in dual damascene process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Integration of low dielectric material in semiconductor...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2049058

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