4. Radiant energy
  5. Ion generation
  6. Electron bombardment type

Alexander S. Perel

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Bellows liner for an ion beam implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Cleaning of an extraction aperture of an ion source

Radiant energy – Ion generation – Field ionization type
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Decaborane ion source

Radiant energy – Ion generation – Electron bombardment type
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Decaborane ionizer

Radiant energy – Ion generation – Electron bombardment type
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Ethane implantation with a dilution gas

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-2072799

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