Cleaning of an extraction aperture of an ion source

Details Cleaning of an extraction aperture of an ion source Cleaning of an extraction aperture of an ion source

2010-03-10

2011-12-06

Nguyen, Kiet (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C134S015000

Reexamination Certificate

active

08071956

ABSTRACT:
An ion source includes an arc chamber housing defining an arc chamber having an extraction aperture, and a wiper assembly comprising a wiper positioned outside the arc chamber in a parked position and configured to be driven from the parked position to operational positions to clean the extraction aperture. A wiper assembly for an ion source includes a wiper configured to be positioned outside an arc chamber of the ion source when in a parked position and driven from the parked position to operational positions to clean an extraction aperture of the ion source.

REFERENCES:
patent: 7791047 (2010-09-01), Horsky et al.
patent: 7820981 (2010-10-01), Horsky et al.

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