4. Optical: systems and elements
  5. Optical amplifier
  6. Beam combination or separation

Alexander N. Bykanov

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Alternative fuels for EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Drive laser delivery systems for EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Drive laser for EUV light source

Optical: systems and elements – Optical amplifier – Beam combination or separation
Reexamination Certificate

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Gas management system for a laser-produced-plasma EUV light...

Radiant energy – Fluent material containment – support or transfer means – With irradiating source or radiating fluent material
Reexamination Certificate

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Laser produced plasma EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2182289

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