Drive laser for EUV light source

Details Drive laser for EUV light source Drive laser for EUV light source

2011-03-29

2011-03-29

Bolda, Eric (Department: 3663)

Optical: systems and elements

Optical amplifier

Beam combination or separation

C359S333000

Reexamination Certificate

active

07916388

ABSTRACT:
A device is described herein which may comprise an oscillator having an oscillator cavity length, Lo, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined=(N+x)*Lo, where “N” is an integer and “x” is a number between 0.4 and 0.6.

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