4. Optics: measuring and testing
  5. By polarized light examination
  6. Of surface reflection

Alexander Michaelis

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Buried strap poly etch back (BSPE) process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Collar formation by selective oxide deposition

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Etch process for recessing polysilicon in trench structures

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Integrated circuit trench device with a dielectric collar...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Integrated circuit vertical trench device and method of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-908225

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