4. Coating apparatus
  5. Gas or vapor deposition

Albert A. Burk, Jr.

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Ceiling arrangement for an epitaxial growth reactor

Coating apparatus – Gas or vapor deposition
Patent

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High Q monolithic MIM capacitor

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
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Method for epitaxially growing .alpha.-silicon carbide on a-axis

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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Susceptor for an epitaxial growth factor

Coating apparatus – Gas or vapor deposition – Work support
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Profile ID: LFUS-PAI-P-169567

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