4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Akiteru Ko

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Method and system for forming a feature in a high-k layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and system for forming a feature in a high-k layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for etching silicon-containing ARC layer with reduced...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Reduced contaminant gas injection system and method of using

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2175958

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